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WebThe present invention has disclosed a method for in-situ aberration measurement in an optical imaging system of lithographic tools, which comprises the steps of: imaging the reticle pattern by the beams transmitting through the reticle via the optical imaging system; using particular tools to measure plural groups of linewidths by modifying the intensity … Webreticle 是后续 步进投影式光刻机出现之后为了区分而命名的(reticle 意思是十字,早期光刻机mask 对准用的是十字坐标). LCD 厂应该用的不是投影式的曝光,更多是像接触式曝 … income restricted apartments houston texas
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